[1] Lieberman M A, Lichtenberg A J. Principles of plasma discharges and materials processing [M]. New York: Wiley, 1994.
[2] Picraux S T. Ion implantation metallurgy [J]. Phys. Today, 1984, 37(11): 38.
[3] Cheung N W. Plasma immersion ion implantation for semiconductor processing [J]. Mater. Chem. Phys., 1996, 46: 132-139.
[4] Conrad J R. Sheath thickness and potential profiles of ion-matrix sheaths for cylindrical and spherical electrodes [J]. J. Appl. Phys., 1987, 62(3): 777-779.
[5] Coeur F L, Pelletier J, Arnal Y, et al. Ion implantation by plasma immersion: interest, limitations and perspectives [J]. Surf. Coat. Techn., 2000, 125: 71-78.
[6] Liu Jinyuan, Wang Zhengxiong, Wang Xiaogang. Sheath criterion for a collisional sheath [J]. Phys. Plasmas, 2003, 10: 3032-3034.
[7] Gascon N, Dudeck M, Barral S. Wall material effects in stationary plasma thrusters I. Parametric studies of an SPT-100 [J]. Phys. Plasmas, 2003, 10: 4123-4136.
[8] Ahedo E, Parra F I. Partial trapping of secondary-electron emission in a Hall thruster plasma [J]. Phys. Plasmas, 2005, 12: 073503.
[9] Sydorenko D, Kaganovich I, Raitses Y, et al. Breakdown of a space charge limited regime of a sheath in a weakly collisional plasma bounded by walls with secondary electron emission [J]. Phys. Rev. Lett., 2009, 103: 145004.
[10] 于达仁, 张凤奎, 李鸿, 等. 霍尔推进器中振荡鞘层对电子与壁面碰撞频率的影响研究[J]. 物理学报, 2009, 58(3): 1844-1888.
[11] 邹秀, 籍延坤, 邹滨雁. 斜磁场中碰撞等离子体鞘层的玻姆判据[J]. 物理学报, 2010, 59(3): 1902-1906.
[12] 赵晓云, 刘金远, 倪致祥, 等. 二次电子发射和负离子存在时的鞘层结构特性[J]. 强激光与粒子束, 2009, 21(9): 1415-1420.
[13] Chalise P R, Rahman M S, Ghomi H, et al. Bacterial inactivation using low-energy pulsed-electron beam [J]. IEEE Trans. Plasma Sci., 2004, 32: 1532-1539.
[14] Ghomi H, Rahman M S, Chalise P R, et al. Experiment investigation of effect of low-energy pulsed atmospheric electron beam on bacterial cells [J]. Jpn. J. Appl. Phys., 2005, 1(44): 8698-8701.
[15] Franklin R N. Plasmas with more than one species of positive ion and the Bohm criterion [J]. J. Phys. D: Appl. Phys., 2000, 33: 3186-3189.
[16] Franklin R N. The plasma-sheath and its stability in a quiescent plasma containing two species of positive ion [J]. J. Phys. D: Appl. Phys., 2003, 36: 1806-1809.
[17] Hershkowitz N, Yip C S, Severn G D. Experimental test of instability enhanced collisional friction for determining ion loss in two ion species plasmas [J]. Phys. Plasmas, 2011, 18: 057102.
[18] Baalrud S D, Hegna C C, Callen J D. Instability- enhanced collisional friction can determine the Bohm criterion in multiple-ion-species plasmas [J]. Phys. Rev. Lett., 2009, 103: 205002.
[19] Hatami M M, Niknam A R, Shokri B, et al. Magnetized plasma sheath with two species of positive ions [J]. Phys. Plasmas, 2008, 15: 053508.
[20] Hatami M M, Niknam A R, Shokri B. Characteristics of ions in a magnetized plasma sheath with two species of positive ions [J]. Vacuum, 2009, 83: 5231-5234.
[21] Hatami M M, Shokri B, Niknam A R. Collisional effects in magnetized plasma sheath with two species of positive ions [J]. J. Phys. D: Appl. Phys., 2009, 42: 025204.
|