外界磁场和天线构型对射频等离子体微放电的影响研究

doi:10.16568/j.0254-6086.202501019

核工业西南物理研究院 ›› 2025, Vol. 45 ›› Issue (1): 117-124.DOI: 10.16568/j.0254-6086.202501019

• 等离子体物理 • 上一篇

外界磁场和天线构型对射频等离子体微放电的影响研究

张金恒1, 2, 3，苌磊*4，杨鑫1，周海山1, 2，罗广南1, 2

(1. 中国科学院合肥物质科学研究院，等离子体物理研究所，合肥 230031；2. 中国科学技术大学，合肥 230026；3. 江南机电设计研究所，贵阳 550009；4. 重庆大学，重庆 400044)

收稿日期:2022-10-12 修回日期:2024-09-07 出版日期:2025-03-15 发布日期:2025-03-15
通讯作者: 苌磊(1984-)，男，安徽泗县人，副教授，博士生导师，从事等离子体基础物理及创新应用研究。
作者简介:张金恒(1997-)，男，贵州铜仁人，硕士研究生，从事低温等离子体物理研究。
基金资助:
国家自然科学基金(12105324)；中央高校基本科研业务费前沿科学与“卡脖子”技术研究子项(2022CDJQY- 003)；重庆市留学人员回国创业创新支持计划重点项目(CX2022004)

Study on the influence of external magnetic field and antenna configuration on radio-frequency plasma microdischarge

ZHANG Jin-heng1, 2, 3, CHANG Lei4, YANG Xin1, ZHOU Hai-shan1, 2, LUO Guang-nan1, 2

(1. Institute of Plasma Physics, HFIPS, Chinese Academy of Sciences, Hefei 230031; 2. University of Science and Technology of China, Hefei 230026; 3. Jiangnan Electromechanical Design Institute, Guiyang 550009; 4. Chongqing University, Chongqing 400044)

Received:2022-10-12 Revised:2024-09-07 Online:2025-03-15 Published:2025-03-15

摘要/Abstract

摘要：

利用HELIC程序，研究了磁场和天线构型对射频微放电的影响。在天线方位角模数m=0和m=1两类典型模式下，外界磁场总是通过影响射频电场的分布影响天线的功率沉积分布，其中m=1的半螺旋(half helix)天线在达到临界磁场(10mT)后，轴向上的功率沉积分布由单峰转变为双峰分布，且峰值主要分布在天线的两侧；而m=0的环形(loop)天线在外界磁场达到临界值(1mT)后，主要呈现为一个单峰分布，且峰值位于天线正下方。而对并排的两个loop(loop⁺⁺)天线，发现其不同轴向位置处的临界磁场值不同(z=0mm处为1mT，z=±60mm处为9mT)，但是其功率沉积和电磁波受外界磁场的影响与m=0的loop天线类似。在无外磁场条件下，loop⁺⁺天线的功率沉积相较于其他两种天线的更大。

关键词: 临界磁场效应, 射频等离子体, 天线构型, 功率沉积, 电磁波传播

Abstract:

Effects of magnetic field and antenna configuration on radio-frequency (RF) microdischarge are studied with the HELIC program. The power deposition and electromagnetic wave parameters affected by the external magnetic field were studied under two typical modes, m=0 and m=1, of antenna modulus. For the half helix antenna with m=1, when the critical magnetic field is 10mT, the axial power deposition and RF electric field distribution change from single peak to dual peaks, and the peak value is mainly distributed on both sides of the antenna. However, when the external magnetic field reaches 1mT, the loop antenna with m=0 mainly presents a single peak distribution, and the peak value is located directly below the antenna. Simultaneously, it is found that the critical magnetic field values of loop⁺⁺ antennas are different at two axial positions (1mT at z=0mm and 9mT at z=±60mm). Finally, the power deposition of loop⁺⁺ antenna is higher than that of the other two antennas without magnetic field.

Key words: Critical magnetic field effect, RF plasma, Antenna configuration, Power deposition, Electromagnetic wave propagation

中图分类号:

TL61+2

张金恒, 苌磊, 杨鑫, 周海山, 罗广南. 外界磁场和天线构型对射频等离子体微放电的影响研究 [J]. 核工业西南物理研究院, 2025, 45(1): 117-124.

ZHANG Jin-heng, CHANG Lei, YANG Xin, ZHOU Hai-shan, LUO Guang-nan. Study on the influence of external magnetic field and antenna configuration on radio-frequency plasma microdischarge[J]. Nuclear Fusion and Plasma Physics, 2025, 45(1): 117-124.

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外界磁场和天线构型对射频等离子体微放电的影响研究

Study on the influence of external magnetic field and antenna configuration on radio-frequency plasma microdischarge

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