非平衡磁控溅射等离子体频谱特征

核聚变与等离子体物理 ›› 2010, Vol. 30 ›› Issue (2): 169-172.

非平衡磁控溅射等离子体频谱特征

牟宗信，牟晓东，贾莉，张鹏云，刘升光，董闯

(三束材料改性教育部重点实验室，大连理工大学物理与光电工程学院，大连 116024)

收稿日期:2009-09-14 修回日期:2010-02-22 出版日期:2010-06-15 发布日期:2010-06-03
作者简介:牟宗信(1969-)，男，山东日照人，副教授，从事低温等离子体应用研究。
基金资助:
国家自然科学基金资助项目(50407015)

Properties of plasma frequency spectrum of the unbalanced magnetron sputtering

MU Zong-xin, MU Xiao-dong, JIA Li, ZHANG Peng-yun, LIU Sheng-guang, DONG Chuang

(Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic technology, Dalian University of Technology, Dalian, 116024)

Received:2009-09-14 Revised:2010-02-22 Online:2010-06-15 Published:2010-06-03

摘要/Abstract

摘要： 利用朗缪尔探针和快速傅里叶变换研究了非平衡磁控溅射等离子体静电波动的驻波共振频谱特征。频带宽度为0~300kHz，典型放电条件下磁控靶前2cm和10cm两个位置的共振本征频率变化范围分别为10~50kHz和1~10kHz，研究了线圈电流、气压和放电功率等参数对共振本征频率的影响；指出了非平衡磁控溅射中能够导致等离子体静电驻波共振的两种势阱结构，提出驻波共振机制解释特征频率出现的原因，根据声驻波共振机制计算的电子温度数值符合实验的结果。

关键词: 磁控溅射, 等离子体, 共振

Abstract: Langmuir probe and fast Fourier transformation (FFT) were used to study the stand wave resonance frequency spectrum features of the plasma electrostatic oscillation of the unbalanced magnetron sputtering. The width of the frequency band was 0~300kHz. The range of resonance eigenfrequency change of the probes 2cm and 10cm in front of the magnetron sputtering under the typical discharge condition was respectively 10~50kHz and 1~10kHz. The impacts of the coil current, pressure and the discharge power on the resonance eigenfrequency were studied. The two potential trap structures causing the stand wave resonance of the plasma electrostatic oscillation in the unbalanced magnetron sputtering were identified and the stand wave resonance mechanism was proposed to explain the characteristic frequency occurred. The electron temperature calculated by the stand wave resonance mechanism conformed to the experiment results.

Key words: Magnetron sputtering, Plasma, Resonance

中图分类号:

O539

牟宗信，牟晓东，贾莉，张鹏云，刘升光，董闯. 非平衡磁控溅射等离子体频谱特征[J]. 核聚变与等离子体物理, 2010, 30(2): 169-172.

MU Zong-xin, MU Xiao-dong, JIA Li, ZHANG Peng-yun, LIU Sheng-guang, DONG Chuang. Properties of plasma frequency spectrum of the unbalanced magnetron sputtering[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2010, 30(2): 169-172.

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