纳秒脉冲等离子体射流的产生及其特征研究

核聚变与等离子体物理 ›› 2010, Vol. 30 ›› Issue (2): 173-177.

纳秒脉冲等离子体射流的产生及其特征研究

朱海龙，任春生，吕晓桂，聂秋月，王德真，马腾才

(大连理工大学物理与光电工程学院，大连 116023)

收稿日期:2009-09-07 修回日期:2010-02-20 出版日期:2010-06-15 发布日期:2010-06-03
作者简介:朱海龙(1981-)，男，内蒙古人，硕士研究生，研究方向：高压纳秒脉冲气体放电实验。
基金资助:
国家自然科学基金资助项目(10775027)；辽宁省自然科学基金资助项目(20072179)

Study of generation and investigation of nanosecond pulsed plasma jet

ZHU Hai-long,REN Chun-sheng,LV Xiao-gui,NIE Qiu-yue,WANG De-zhen,MA Teng-cai

(School of Physics and Optoelectronic Engineering, Dalian University of Technology, Dalian 116024, China)

Received:2009-09-07 Revised:2010-02-20 Online:2010-06-15 Published:2010-06-03

摘要/Abstract

摘要： 利用纳秒脉冲放电在单针、环状、以及单针加环状三种不同电极结构下产生了均匀稳定的等离子体射流；通过光学和电学诊断研究了三种不同结构下等离子体射流的运行特性及相应的物理机制。实验结果表明，以上三种等离子体射流的转动温度均为295K，振动温度分别为1900K，2000K和2100K，都属于非平衡态等离子体；其中，基于单针和环状电极的混合型射流可产生更为均匀稳定的等离子体，且富含较多的活性物种，有望在材料表面处理及消毒灭菌等领域发挥一定作用。

关键词: 纳秒脉冲, 等离子体射流, 发射光谱诊断, 非平衡态等离子体

Abstract: Three atmospheric nanosecond pulsed plasma jets are studied based on three different configurations. The first consists of an injection needle placed inside a hollow dielectric tube, while the second employs a ring electrode wrapped around a dielectric tube. The third is a hybrid of the first two configurations. The characteristics of the jets are diagnosed by optical and electrical methods, and the mechanism is studied. For these three plasma jets, the rotational temperature are all 295K, while the vibration temperature are 1900K, 2000K, and 2100K, respectively. The results above demonstrate that plasmas generated by these three nanosecond pulsed plasma jets are of the state of nonequilibrium. Furthermore, the investigation suggests that the hybrid jet with both the needle and the ring electrode connecting to the high-voltage has a better performance, for which a uniform and stable discharge with low temperature and higher reactive species is achieved. It is conceivable that the cold atmospheric nanosecond pulsed plasma jets have a great potential of application in the area of material processing，plasma chemistry and plasma medicine, etc.

Key words: Nanosecond pulse, Plasma jet, Emission spectrum diagnosis, Nonequilibrium plasma

中图分类号:

O539

朱海龙，任春生，吕晓桂，聂秋月，王德真，马腾才. 纳秒脉冲等离子体射流的产生及其特征研究[J]. 核聚变与等离子体物理, 2010, 30(2): 173-177.

ZHU Hai-long,REN Chun-sheng,LV Xiao-gui,NIE Qiu-yue,WANG De-zhen,MA Teng-cai. Study of generation and investigation of nanosecond pulsed plasma jet[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2010, 30(2): 173-177.

参考文献

[1] Bogaerts A, Neyts E, Gijbels R, et al. Gas discharge plasmas and their applications[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 2002, 57(4): 609-658.

[2] Jeong J Y, Babayan S E, Schutze A, et al. Etching polyimide with nonequilibrium atmospheric-pressure plasma jet[J]. J. Vac.Sci. Techn. A, 1999, 17 (5): 2581-2585.

[3] Kolb J F, Mohamed A A H, Price R O, et al. Cold atmospheric pressure air plasma jet for medical applications[J]. Applied Physics Letters, 2008, 92(24): 1501.

[4] Anders A. Fundamentals of pulsed plasmas for materials processing [J]. Surface and Coatings Technology, 2004, 183(2):301-311.

[5] Walsh J L, Shi J J, Kong M G. Contrasting characteristics of pulsed and sinusoidal cold atmospheric plasma jets[J]. Applied Physics Letters, 2006, 88(17): 1501.

[6] Lu X P, Jiang Z H, Xiong Q, et al. A single electrode room-temperature plasma jet device for biomedical applications[J].Applied Physics Letters, 2008,92(15): 1504.

[7] LéveilléV, Coulombe S. Atomic oxygen production and exploration of reaction mechanisms in a He-O₂ atmospheric pressure glow discharge torch [J]. Plasma Processes and Polymers, 2006, 3(8): 587-596.

[8] 邵涛, 潘洋, 王珏, 等. 高压重复频率纳秒脉冲下电信号的测量与诊断[J]. 强激光与离子束, 2005, 17 (4): 603-608.

[9] 屠昕, 严建华, 马增益, 等. 基于N₂⁺(B² ∑u⁺→x²∑g⁺)的电弧等离子体振动温度和转动温度测量[J]. 光谱学与光谱分析, 2006, 26 (12): 2161-2165.

[10] 潘洋, 严萍, 袁伟群. 时变软阈值法在纳秒脉冲信号去噪中的应用[J]. 强激光与离子束, 2005, 17(5): 770-774.

[11] Walsh J L, Konga M G. 10ns pulsed atmospheric air plasma for uniform treatment of polymeric surfaces[J]. Applied Physics Letters, 2007, 91(25): 150.