氦氢离子协同注入对锆膜形貌及物相结构的影响

doi:10.16568/j.0254-6086.202004012

核聚变与等离子体物理 ›› 2020, Vol. 40 ›› Issue (4): 364-371.DOI: 10.16568/j.0254-6086.202004012

氦氢离子协同注入对锆膜形貌及物相结构的影响

傅雨鑫，李游，粟超，马世新，蒋宏伟，韦家军，刘洋*

(西南科技大学国防科技学院，绵阳 621010)

收稿日期:2019-04-02 修回日期:2020-04-12 出版日期:2020-12-15 发布日期:2021-06-03
作者简介:傅雨鑫(1998-)，男，重庆市长寿人，大学本科生，从事离子束辐照效应研究。
基金资助:
国家级大学生创新创业训练计划(201910619019)；西南科技大学大学生创新基金(CX-017，CX-016)；西南科技大学创新基金精准资助专项(JZ19-025)

Effects of synergistic implantation of helium and hydrogen ions on morphology and phase structure of zirconium film

FU Yu-xin, LI You, SU Chao, MA Shi-xin, JIANG Hong-wei, WEI Jia-jun, LIU Yang

(School of National Defence Science and Technology, Southwest University of Science and Technology, Mianyang 621010)

Received:2019-04-02 Revised:2020-04-12 Online:2020-12-15 Published:2021-06-03
Supported by:

摘要/Abstract

摘要： 采用磁控溅射法制备了Zr-Mo膜，随后在低能静电加速器上分别采用剂量为2.80×10¹⁷~1.12 ×10¹⁸ions·cm^-2的He⁺、H⁺离子辐照Zr-Mo膜，利用光学透镜、扫描电镜、原子力显微镜和X射线衍射研究He⁺、H⁺离子协同注入效应对Zr-Mo膜微观结构的影响。实验结果表明：原始Zr-Mo膜表层晶粒清晰可见，尺寸约为200nm；辐照效应可导致Zr-Mo膜表层产生微观损伤区域，在注He⁺基础上注H⁺导致Zr-Mo膜出现更为严重的损伤现象；离子注入的表面溅射效应可使膜面晶粒边界逐渐刻蚀退让，导致膜面更加光滑、细致；He⁺、H⁺ 离子协同注入可使Zr-Mo膜晶格发生畸变，注入期间未使Zr-Mo膜发生吸H相变生成氢化物。

关键词: , 氢化锆；辐照效应；物相结构；表面形貌

Abstract: Zr-Mo films were prepared by magnetron sputtering, then films were co-implanted with He⁺ and H⁺ ions at doses of 2.80×10¹⁷~1.12×10¹⁸ ions×cm^-2 in a low energy electrostatic accelerator. The synergistic injection effects of He⁺ and H⁺ ions on the microstructures of Zr-Mo films were studied by optical lenses, scanning electron microscopy, atomic force microscopy and X ray diffraction. Experimental results show that the surface grain of the original Zr-Mo film is clearly visible with a size of about 200nm, micro damage region on the surface of Zr-Mo film can be induced by radiation effect, and injection of H⁺ on the basis of He⁺ leads to more serious damage to the film. It is found that Zr-Mo film surface is gradually becoming smooth as a result of the gradually etched grain boundary by the ion beam sputtering effect. Co-implantation of He⁺ and H⁺ ions can distort the lattice of Zr-Mo films, but it is still not noticed a phase transformation of ZrH during the injection.

Key words: Zirconium hydride, Irradiation effect, Phase structure, Surface morphology

中图分类号:

TL99

傅雨鑫，李游，粟超，马世新，蒋宏伟，韦家军，刘洋*. 氦氢离子协同注入对锆膜形貌及物相结构的影响[J]. 核聚变与等离子体物理, 2020, 40(4): 364-371.

FU Yu-xin, LI You, SU Chao, MA Shi-xin, JIANG Hong-wei, WEI Jia-jun, LIU Yang. Effects of synergistic implantation of helium and hydrogen ions on morphology and phase structure of zirconium film[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2020, 40(4): 364-371.

参考文献

[1] Srinivasan P, Priya S, Patel T, et al. Assessment of radiation shield integrity of DD/DT fusion neutron generator facilities by Monte Carlo and experimental methods [J]. Nuclear Instruments & Methods in Physics Research, 2015, 342: 125-132.
[2]王博宇, 向伟, 戴晶怡, 等. D+离子束和自成型钛靶的作用特性研究 [J]. 稀有金属材料与工程, 2011, 40(6): 1105-1109.
[3]Taylor M, Sengbusch E, Seyfert C, et al. Thermal neutron radiography using a high-flux compact neutron generator [J]. Physics Procedia, 2017, 88: 175-183.
[4]Denisov E A，Kompaniets T N，Voyt A P. Kinetics of the isothermal decomposition of zirconium hydride: terminal solid solubility for precipitation and dissolution [J]. J. Nucl. Mater., 2018, 503: 195-197.
[5]Cheng G J, Shi L Q, Zhou X S, et al. Thermal desorption behavior of helium in aged titanium tritide films [J]. J. Nucl. Mater., 2015, 466: 615-620.
[6]Wittman M D, Bonino M J, Edgell D H, et al. Effect of tritium-induced damage on plastic targets from high-density DT permeation [J]. Fusion Science and Technology, 2018, 73: 315-323.
[7]刘洋, 杨涛, 王旋, 等. D-T中子发生器用氚钛靶的存储时间对其结构稳定性的影响 [J]. 稀有金属材料与工程, 2017, 46(6): 1731-1733.
[8]Tu R J, Jin W B, Wang M, et al. Improving of lipid productivity of the biodiesel promising green microalga Chlorella pyrenoidosa via low-energy ion implantation [J]. Journal of Applied Phycology, 2016, 28(4): 2159.
[9]Zhang F, Wang X, Wierschke J B, et al. Helium bubble evolution in ion irradiated Al/B4C metal metrix composite [J]. Scripta Materialia, 2015, 109: 28-33.
[10]Zhou X S, Zhang L, Wang W D, et al. 3He retention and structural evolution in erbium tritides: Phase and aging effects [J]. J. Nucl. Mater., 2015, 461: 157-163.
[11]Denisov E A, Kompaniets T N, Voyt A P. Kinetics of the isothermal decomposition of zirconium hydride: terminal solid solubility for precipitation and dissolution [J]. J. Nucl. Mater., 2018, 503(4): 2159.
[12]Liu Y, Fang K H, Lv H Y, et al. Hydrogenation of zirconium film by implantation of hydrogen ions [J]. Plasma Science and Technology, 2017, 19(3): 88-92.
[13]Zhi Y W, Steuwe A, Liu N X, et al. Observations of temperature stability of γ-zirconium hydride by high-resolution neutron powder diffraction [J]. Journal of Alloys and Compounds, 2016, 661: 55. Bsenbacher F,
[14]Bscttiger J, Myers S M. Defect trapping of ion‐implanted deuterium in nickel [J]. Journal of Applied Physics, 1984, 56(12): 3384-3393.
[15]Ogura M, Yamaji N, Higuchi T, et al. Thermal behavior of hydrogen in helium-implanted high-purity SUS316L [J]. Nuclear Instruments and Methods in Physics Research Section B, 1998, 136(1): 483-487.
[16]Abrate M. Effect of external stress at annealing on microstructure of silicon co-implanted with hydrogen and helium [J]. Solid State Phenomena, 2004, 95-96(5-6): 313.

氦氢离子协同注入对锆膜形貌及物相结构的影响

Effects of synergistic implantation of helium and hydrogen ions on morphology and phase structure of zirconium film

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