氦氢离子协同注入对锆膜形貌及物相结构的影响
傅雨鑫，李 游，粟 超，马世新，蒋宏伟，韦家军，刘 洋*
Effects of synergistic implantation of helium and hydrogen ions on morphology and phase structure of zirconium film
FU Yu-xin, LI You, SU Chao, MA Shi-xin, JIANG Hong-wei, WEI Jia-jun, LIU Yang
核聚变与等离子体物理
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2020, (4): 364
-371
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DOI: 10.16568/j.0254-6086.202004012
