Abstract: Based on plasma fluid theory, a one-dimensional fluid model of atmospheric pressure pulse 
modulated radio frequency (RF) argon discharge is established. The effects of discharge parameters (discharge 
gap, radio frequency) on argon discharge characteristics are studied by numerical simulation. The results show 
that the plasma density increases first and then drops as the electrode gap increases when the applied voltage is 
fixed, and it has an optimal value. As the electrode gap keeps increasing, the discharge current density and input 
power density increase, and the electron temperature decreases in the sheath region while it increases in the 
plasma region during the early time of the pulse while the electrode gap has little effect on electron temperature 
during the later time of the pulse. The maximum electron density decreases with electrode gap increase at the 
different frequency, and it has an optimal value. 

Key words: Atmospheric pressure, Pulse modulation, Argon discharge, Numerical simulation 

摘要： 基于等离子体流体理论，建立了大气压脉冲调制射频氩气放电的一维流体模型。通过数值模拟的方
法研究了放电参数(放电电极间距、射频频率)对氩等离子体特性的影响。研究结果表明：当电压固定时，随着电
极间距的增加，等离子体区逐渐增大，最大电子密度也增加，在 0.20cm 达到最大值后略有降低；放电电流密度
与输入功率密度随着电极间距的增加而增加；鞘层区电子温度随着电极间距的增加而降低；在脉冲开启前期，等
离子体区电子温度随着电极间距的增加而增加，但当脉冲开启后期，电极间距对等离子体区电子温度影响较小。
不同射频频率下最大电子密度随电极间隙的增加而减小，也具有一个最优值。 

关键词: 大气压, 脉冲调制, 氩气放电, 数值模拟