In this paper, the deposition characteristics of plasma facing components (PFCs) in plasma environment are simulated by using PEGASUS software with particle simulation method. The results show that the PFCs’ geometry, surface roughness, angle of incidence, and flux have a significant effect on the deposition. The influence of incident energy on deposition is small when the energy is small and sputtering is negligible. The smaller the roughness is, the smaller the deposition amount will be. With the same roughness, different contours can also cause large changes in deposition, and it is more possible to reduce deposition when the contour structures are conformable. This simulation is of great significance for investigating on interactions between plasma and PFCs, and analyzing the influence of tile gap dimensions, tile processing technology and plasma parameters on the deposition behaviors of PFCs.