Abstract: Based on the methods of residual gas monitoring and helium leak testing, the leak test of HL-2M vacuum chamber was performed with the leak detection system after pre-assembly in the factory and on site respectively. After the leakages were repaired, the vacuum chamber was pumped down to test the ultimate vacuum and the total leak rate. The pressure in the vacuum vessel reached 3.7×10⁻⁵Pa after 72 hours’ pumpdown, better than the expected value 1.0×10⁻⁴Pa. The total leak by static constant volume method was 2.3×10^{− 7}Pa⋅m³⋅s⁻¹, lower than the design value 5×10⁻⁷Pa⋅m³⋅s⁻¹. The test shows that the ultrahigh vacuum condition of HL-2M tokamak is achieved and satisfies the design specification.

Key words: Ultrahigh vacuum, Helium leak test, Residual gas analysis, Total leak rate

摘要： 通过在加工现场和安装现场搭建的真空辅助系统、四极质谱计及氦检漏仪组成的检漏系统，运用残 余气体分析和氦质谱检漏方法在冷态下对 HL-2M 真空室扇形段及真空室整体进行了真空检漏试验。对漏点进行 修复后，测试了真空室的极限真空度和总漏气率等。真空室经过 72h 的抽气后，真空度达到 3.7×10⁻⁵Pa，超过了 1.0×10⁻⁴Pa 的预期预抽真空度。用静态定容法测得的真空室漏放气率为 2.3×10⁻⁷Pa⋅m³⋅s⁻¹，小于设定的真空漏率 技术指标 5×10⁻⁷Pa⋅m³⋅s⁻¹。试验结果表明 HL-2M 装置真空室满足超高真空条件，符合设计要求。

关键词: 超高真空；氦质谱检漏；残余气体分析；总漏气率