Abstract:

According to the gas dynamics and the technique of quadruple mass spectrometry (QMS) , a method for measuring large device vacuum leak rate is put forward. The vacuum leak and outgassing rate can be inspected iteratively with combining computer technique, and this method has applied successfully on the HL-1M tokamak.

Key words: QMS analysis, Leak and outgassing rate;Measurement

摘要：

根据质谱分析技术和气体动力学方程, 提出了一种用质谱测量法对大型真空装置漏放率的测试方法。结合计算机技术能对装置运行状态的漏放率进行巡回检测, 并成功地应用于HL-1M 装置。

关键词: 质谱分析, 漏放率, 检测