Abstract: In order to study the effect of contact thermal resistance on the temperature and distribution of a water-cooled glow discharge electrode, computational fluid dynamics software ANSYS CFX was used to simulate the variation of electrode surface temperature and temperature difference with various contact thermal resistance between aluminum nitride (ALN) ceramic and copper conductor on both sides. The simulation results show that with the increase of thermal contact resistance, the temperature jump at the contact interface between ALN ceramic and copper increases, the electrode temperature increases, and the maximum temperature and maximum temperature difference on the electrode surface show an exponential increasing trend. 

Key words: Glow discharge electrode, Contact thermal resistance, ANSYS CFX, Temperature distribution 

摘要： 为了研究接触热阻对陶瓷绝缘水冷辉光放电电极温度及其分布的影响，利用计算流体动力学软件 ANSYS CFX，模拟了电极表面温度、温差随氮化铝陶瓷与两侧铜导体之间接触热阻的变化。模拟结果表明：随着接触热阻的增大，氮化铝陶瓷与铜接触界面的温度跳变幅度增大，辉光放电电极整体温度上升，并且辉光放电电极表面的最高温度和最大温差均随之呈现指数上升的变化趋势。

关键词: GDC 辉光放电电极, 接触热阻, ANSYS CFX, 温度分布