关键词: 管状内壁, 直流真空阴极弧, TiN 涂层, 显微硬度, 择优取向

Abstract: TiN films were deposited on Cu plate and TC11 titanium alloy embedded in the barrel surface by DC cathodic vacuum arc technology. The structure and mechanical properties of TiN films were investigated by optical microscope, scanning electron microscopy (SEM), stylus profiler, X-ray diffraction(XRD) and micro-hardness tester. It was shown that all films are 2.7~3.0 micron thick. The film thickness uniformity is 94.7%. All films have coarse surface and large particles with magnitude of microns. The surface roughness Ra of all films increases by about 0.2~0.3 microns. Under the same deposition temperature, the particles on the film surface are refined with the nitrogen pressure. The films are composed of TiN with (111), (102), (200), (220), (311)and (222) planes. The microhardness of the film increases and the preferred orientation of TiN (111) is more distinct with the nitrogen pressure at the same deposition temperature. Moreover, the microhardness of the film increases and the preferred orientation of TiN (111) is more distinct with the deposition temperature at the same nitrogen pressure.

Key words: Pipe fitting in wall, DC cathodic vacuum arc, TiN films, Micro-hardness, Preferred orientation