直流真空阴极弧管状内壁制备 TiN 涂层性能研究
吕 玲, 华 程, 梁 鑫, 廖广其
Micro-structure and properties of TiN film deposited on the barrel surface by DC cathodic vacuum arc technology
LÜ Ling , HUA Cheng, LIANG Xin , LIAO Guang-qi
核工业西南物理研究院
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2024, (4): 380
-387
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DOI: 10.16568/j.0254-6086.202404002
