多腔耦合微波表面波PECVD法沉积 DLC薄膜研究

doi:10.16568/j.0254-6086.201803021

核聚变与等离子体物理 ›› 2018, Vol. 2 ›› Issue (3): 368-372.DOI: 10.16568/j.0254-6086.201803021

• 等离子体应用 • 上一篇

多腔耦合微波表面波PECVD法沉积 DLC薄膜研究

赵曼曼1，桑利军1，周美丽2，杨丽珍1，刘忠伟1，陈强1

(1. 北京印刷学院等离子体物理及材料研究室，北京102600；2. 山东工艺美术学院包装工程系，济南 250000)

收稿日期:2016-09-26 修回日期:2018-04-03 出版日期:2018-09-15 发布日期:2018-09-14
作者简介:赵曼曼(1990-)，女，河南省周口店市人，硕士研究生，材料科学与工程专业，主要研究方向：微波等离子体增强化学气相沉积，大气压原子层沉积。
基金资助:
国家自然科学基金(11775028, 11505013)；北京市教委项目(4162024, KM201510015009)；北京市协同创新(20160113)

Study on deposition of DLC coating by the multi-cavity coupling microwave surface-wave PECVD technique

ZHAO Man-man, SANG Li-jun, ZHOU Mei-li, YANG Li-zhen, LIU Zhong-wei, CHEN Qiang

(1. Lab of plasma physics and materials, Beijing Institute of Graphic Communication, Beijing 102600; 2. Shandong University of Art & Design, Jinan 250000)

Received:2016-09-26 Revised:2018-04-03 Online:2018-09-15 Published:2018-09-14

摘要/Abstract

摘要：

报道了利用多腔耦合微波表面波等离子体增强化学气相沉积(PECVD)的方法制备类金刚石(DLC)薄膜。通过发射光谱(OES)测量，对Ar等离子体中的各种放电参数以及全部四个腔室内放电的均匀性作出评估。采用表面轮廓仪测量了薄膜的厚度；薄膜的表面形貌、组成结构通过原子力显微镜(AFM)、激光拉曼光谱和X射线衍射光谱(XPS)进行了表征。在12.5μm厚度的有机薄膜聚酯(PET)表面沉积一定厚度DLC后，通过测量水蒸气透过率(WVTR)对DLC薄膜的阻隔性能进行了研究。结果表明，这种多腔耦合微波表面波等离子体装置，不仅能够实现四个腔室同时相对均匀的放电，也能够实现单个腔室的轴向均匀放电。制备的DLC薄膜结构致密、成分均匀，可以使PET薄膜阻隔性能提高约20倍。

关键词: 微波表面波, 发射光谱, 类金刚石, 薄膜

Abstract:

The diamond-like carbon (DLC) coating is deposited by a multi-cavity coupling microwave surface-wave device based on plasma enhanced chemical vapor deposition (PECVD) technique. The optical emission spectrum (OES) is measured to assess the simultaneous discharge parameters in Ar plasma and the discharge uniformity in all four chambers. The surface profilometer is used to measure the coating thickness. The atomic force microscope (AFM), laser Raman spectrum and X-ray diffraction spectrum (XPS) are utilized to characterise the morphology and composition of coatings. The barrier property of DLC coating is detected by the water vapor transmission rate (WVTR) measurement after 12.5μm PET surface coated by DLC with certain thickness. The results show that the multi-cavity coupling microwave surface wave plasma device can achieve a relativity uniform discharge in all four cavities, as well as uniform discharge along the antenna in single cavity. The DLC coatings demonstrate a dense and uniform structure. The barrier property of PET is improved approximately 20 times.

Key words: Microwave surface-wave, Optical emission spectrum, DLC, Coating

中图分类号:

O539
TB43

赵曼曼1，桑利军1，周美丽2，杨丽珍1，刘忠伟1，陈强1. 多腔耦合微波表面波PECVD法沉积 DLC薄膜研究[J]. 核聚变与等离子体物理, 2018, 2(3): 368-372.

ZHAO Man-man, SANG Li-jun, ZHOU Mei-li, YANG Li-zhen, LIU Zhong-wei, CHEN Qiang. Study on deposition of DLC coating by the multi-cavity coupling microwave surface-wave PECVD technique[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2018, 2(3): 368-372.

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多腔耦合微波表面波PECVD法沉积 DLC薄膜研究

Study on deposition of DLC coating by the multi-cavity coupling microwave surface-wave PECVD technique

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