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Welcome to Nuclear Fusion and Plasma Physics, Today is
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Superintendent: Southwestern Institute of Physics
Sponsored by: Southwestern Institute of Physics
ISSN 0254-6086 CN 51-1151/TL
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中文
Measurement of plasma parameters in rf-biased ECR-PECVD#br#
XU Shu-hua, REN Zhao-xing, SHEN Ke-ming
Nuclear Fusion and Plasma Physics . 2004, (
1
): 63 -66 .