Abstract:

The performance test of gas pressure measuring and analysis system for quadrupole mass spectrometer was carried out. The ultimate vacuum is 7.3×10^-7Pa after the system was baked, and total leak rate is 3.84×10^-9Pa•m³•s^-1. The pressure relationship between upper and lower chamber is linear dependence. So is the relationship of the helium leak rate and partial pressure. The results meet the design requirements of dynamic flow conductance, and provide basic conditions for mass spectrograph analysis.

Key words: Ultimate vacuum, Leak rate, Linear dependence, Dynamic flow conductance

摘要：

对所研制的质谱测量与分析系统进行了性能测试。烘烤后系统的极限真空达到了7.3×10^-7Pa，

总漏气率为3.84×10^-9Pa.m3.s-1。上下球室之间的气体压力，以及漏孔的漏气率与高分辨四极质谱计的氦分压力均

呈现了良好的线性关系。结果满足动态流导法真空校准的技术要求，为氘、氦混合气体的测量与分析提供了条件。

关键词: 极限真空, 漏气率, 线性关系, 动态流导法