Abstract:

A series of spectral lines of emissive spectrum with relative intensity in double glow discharge of equivalent electric potent ial under different processing parameters using SII-IV type holographic concave grating monochrometer has been acquired. Electron temperature for different processes was achieved by solving Boltzmann equation. The influence of the work piece voltage and the work pressure upon electron temperature has been analyzed. The results indicate that electron temperature reduced initially, then increased, but reduced again with the work piece voltage increase; and it increased with the work pressure increase in this process. The electron temperature change due to change of work pressure is more great than that of the work piece voltage.

Key words: Electron temperature, Glow discharge, Emission spectrum, Spectrum analysis

摘要：

用SII- IV 型全息凹面光栅单色仪对各种工艺参数条件下双层辉光等电位放电的发射光谱的相对强度进行了测量, 获得一系列光谱谱线。通过对玻尔兹曼方程式的计算, 得到了不同工艺条件下等离子放电时的电子温度。分析了工件电压、工作气压对电子温度的影响。结果表明: 在本工艺条件下, 电子温度随着工件电压的升高, 先减小后增大, 然后又减小, 并随着工作气压的增大而单调增大。工作气压的变化较工件电压的变化对电子温度的影响大。

关键词: 电子温度, 辉光放电, 发射光谱, 光谱分析