Abstract: A low power cylindrical anode layer ion source and its working characteristic, and the beam distribution are introduced. This ion source has two working states, emanative state and collimated state, and the  normal parameters of this system are: working voltage 200～1200V, discharge current 0.1～1.4A, air pressure 1.9×10^-2～1.7×10^-1Pa, gas flow 5～20sccm.

Key words: Cylindrical, Anode layer ion source, Ion beam, Emanative state, Collimated state

摘要： 介绍了一种低功率圆柱形阳极层离子源的工作特性和束流分布特性。离子源正常工作参数范围为工作电压200～1200V，放电电流0.1～1.4A，工作气压1.9×10^-2～1.7×10^-1Pa，气体流量5～20sccm。离子源有两个工作状态：发散状态和准直性状态。

关键词: 圆柱形阳极层离子源, 离子束, 发散状态, 准直性状态