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Nuclear Fusion and Plasma Physics ›› 2004, Vol. 24 ›› Issue (1): 67-72.

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The “ droop” method to measure space plasma potential with emissive probes#br#

SUN Qiu-pu1,DENG Xin-lu2,MA Teng-cai2,SONG Yuan-hong2   

  1. (1.Department of Physics, Qiqihaer University, Qiqihaer161006;2.State Key Laboratory of Material Modification by Laser, Electron and Ion Beams, Dalian University of Technology, Dalian 116024)
  • Received:2003-07-28 Revised:2003-10-20 Online:2004-03-15 Published:2024-11-27

用发射探针降落法测量等离子体空间电位

孙秋普1,邓新绿2,马腾才2,宋远红2   

  1. (1.齐齐哈尔大学物理系,齐齐哈尔 161006;2.大连理工大学三束材料改性国家重点实验室,大连 116024)
  • 作者简介:孙秋普(1962-),女,黑龙江省人,硕士,讲师,1995年毕业于大连理工大学等离子体物理专业,现从事基础物 理及等离子体物理的教学与研究。

Abstract: A method for measuring the plasma potential with emissive probes, the “droop” method, is presented in this paper.The plasma space potential for the microwave plasma source of double “ECR” chamber has been measured in this method.The radial distribution of the plasma space potential and its variation with pressure and the microwave power has been derived∙

Key words: Floating potential, Plasma space potential

摘要: 介绍了一种用发射探针测量等离子体空间电位的方法——“降落法”,并利用这种方法测量了双共振腔 ECR 微波等离子体源的空间电位分布,从中得到该等离子体内部的一些电场信息。给出了不同微波功率和不同压强下 Ar 等离子体空间电位的分布情况。

关键词: 悬浮电位, 等离子体空间电位

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