Abstract: HL-2M vacuum pre-pumping system is composed of four turbo molecular pump units and four 
cryo-pump units. Vacuum degree of 2.3×10⁻⁶Pa was achieved, after 100℃ baking of the vacuum chamber, which 
exceeded the design requirement and satisfied HL-2M plasma discharges. 

Key words: Ultra high vacuum, Pumping system, Vacuum chamber, Effective pumping speed 

摘要： HL-2M 装置真空抽气系统包括 4 套涡轮分子泵机组和 4 套低温泵机组。辅助系统主要由设备逻辑
控制与信号测量、水冷却循环系统和设备供气系统 3 部分组成。真空室经过 100℃烘烤后真空度达到 2.3×10⁻⁶Pa，
超过了设计预期真空度，满足超高真空技术要求。

关键词: 超高真空；抽气系统；真空室；有效抽速