Abstract: Considering the collision as energy transfer mechanism, and the approximate condition of local thermodynamic equilibrium, and the potential distribution between two electrodes in glow discharge, relations for electron density with macro parameters pressure and electron temperature with electric field strength are obtained. A diagnostic method for measuring the electron temperature and electron density using pressure and applied voltage and current is presented. The obtained results are verified by using Langmuir probe.

Key words: Plasma diagnosis, Electron temperature, Electron density, Dalton’s law of partial pressures

摘要： 以碰撞为能量交换机制，按局部热力学平衡近似处理低气压等离子体，并考虑辉光放电二极之间的电位分布，得到了电子密度与气体压力的关系和电子温度与电场强度的关系。提出了一种利用压强、电压和电流就获得电子温度和密度的诊断方法。用Langmuir探针方法验证了获得的结果。

关键词: 等离子体诊断, 电子温度, 电子密度, 道尔顿定律