Abstract: The HL-2M vacuum baking system use two PLCs (Programmable logic Controller) to form an 
automatic control system, and compile the corresponding logic program according to the process requirements to 
control each actuator, realize the program adjustment of the system heater electric power, heat exchanger heat load 
and valve opening, and achieve the purpose of baking with a temperature rise gradient of ±2℃. The PLC 
establishes the profinet communication protocol with the valve island, and controls the on-off valves in and out of 
the vacuum chamber and the divertor through address mapping and adjusts the load input of the baking system. 

Key words: PLC, Nitrogen baking, Profinet communication 

摘要： HL-2M 真空烘烤系统采用两台可编程逻辑控制器(PLC)构成一个自动控制系统，根据工艺要求编制
相应逻辑程序来控制各执行机构，实现对系统加热器电功率、换热器热负荷以及阀门开度的程序调节，达到±2℃
温升梯度的烘烤目的。PLC 与阀岛建立工业以太网(Profinet)通信协议，通过地址映射的方式控制进出真空室和偏
滤器的开关阀，调整烘烤系统的负载投入。

关键词: 可编程逻辑控制器(PLC)；真空烘烤；工业以太网通信