The characteristics of electron extraction of inductively coupled plasma neutralization gun

doi:10.16568/j.0254-6086.202102016

NUCLEAR FUSION AND PLASMA PHYSICS ›› 2021, Vol. 41 ›› Issue (2): 187-192.DOI: 10.16568/j.0254-6086.202102016

• Non-Fusion Plasma Applications • Previous Articles

The characteristics of electron extraction of inductively coupled plasma neutralization gun

LUO Xian-wen

(Guilin University of Technology, Guilin 541006)

Received:2019-12-20 Revised:2020-09-17 Online:2021-06-15 Published:2021-06-24

感应耦合等离子体中和枪的电子引出特性研究

罗先文

(桂林理工大学，桂林 641006)

作者简介:罗先文(1985-)，男，广西宜州人，博士，助理研究员，从事离子源研究。
基金资助:
国家自然科学基金(11405166)；广西科技基地与人才专项(桂科AD20238068)

Abstract

Abstract: A design of inductively coupled plasma source using in plasma neutralization gun is present. The electron extraction characteristics of the plasma source were studied experimentally, and the relationship between plasma density and RF power was analyzed. The results show that the electron extraction characteristics of the plasma source are related to the gas pressure in the discharge chamber, and the change of electron density during E-H mode conversion is related to the inductance of the load.

Key words: Plasma neutralization gun, Inductively coupled plasma, Electron extraction characteristics

摘要： 给出了一种感应耦合等离子体源的设计，用于等离子体中和枪装置。通过实验方法研究等离子体源的电子引出特性，并结合理论分析了等离子体密度随射频功率的变化关系。研究结果表明等离子体源的电子引出特性与放电腔内气压有关联性，E?H模式转换中电子密度的变化与负载的电感值相关。研究成果对等离子体中和枪的发展有重要的参考价值。

关键词: 等离子体中和枪, 感应耦合等离子体, 电子引出特性

CLC Number:

O562

LUO Xian-wen. The characteristics of electron extraction of inductively coupled plasma neutralization gun[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2021, 41(2): 187-192.

罗先文. 感应耦合等离子体中和枪的电子引出特性研究[J]. 核聚变与等离子体物理, 2021, 41(2): 187-192.

References

[1] Ito H, Kamata T, England J, et al. The precision implant 9500 plasma flood system-the advanced solution to wafer charging [J]. Nuclear Instruments and Methods in Physics Research B, 1995, 96: 30−33.

[2] Kurunczi P, Benveniste V, Naumovski O. Inductively coupled plasma flood gun using an immersed low inductive for coil and multicusp magnetic arragement [P]. Pub. No.: US, 2012, 0085917 A1.

[3] Ito H, Current M I. Plasma flood system-physics of low energy electron generation, plasma coupling, electron transport and surface charge neutralization on wafer [C]. Proceedings of the 11^th International Conference on Ion Implantation Technology, 1996. 432−435.

[4] 唐平瀛, 刘铁, 丁伯南, 等. 高频离子源等离子体的光谱诊断 [J]. 强激光与粒子束, 2003,15(3): 0293.

[5] Staebler A, Fantz U, Franzen P, et al. Development of a RF-driven ion source for the ITER NBI system [J]. Fusion Engineering and Design, 2009, 84: 265−268.

[6] Hamamoto N, Sakai S, Ikejiri T, et al. Performance of RF plasma flood gun for medium current implanter [C]. Proceedings of the 14^th International Conference on Ion Implantation Technology, 2002. 307−310.

[7] Gao F, Zhao S X, Li X S, et al. Effects of matching network on the hysteresis during E and H mode transitions in Argon inductively coupled plasma [J]. Physics of Plasma, 2010, 17(10): 1003−1009.

[8] Stratoti G, Ficarra L, Cummings J, et al. Low-energy electron generator for wafer charge neutralization [C]. 10.1109/IIT.2016.7882890, 21st International Conference on Ion Implantation Technology (IIT), 2016.

[9] Zhao X, Yu PC, Liu Y, et al. The transition mechanisms of the E to H mode and the H to E mode in an inductively coupled argon-mercury mixture discharge [J]. Physics of Plasmas, 2015, 22: 103509.

[10] Kortshagen U, Gibson N D, Lawler J E. On the E-H mode transition in RF inductive discharges [J]. J. Phys. D: Appl. Phys., 1996, 29: 1224−1236.

[11] 马旺, 李益文, 赵伟灼, 等. 轴向磁场下感应耦合放电模式转换的实验研究 [J]. 强激光与粒子束, 2019, 31(2): 022002.

[12] 赵书霞. 射频感应耦合等离子体放电模式转变机理的模拟研究 [D]. 大连: 大连理工大学, 2010.

[13] Scholze F, Tartz M, Neumann H. Inductive coupled radio frequency plasma bridge neutralizer [J]. Review of Scientific Instruments, 2008, 79: 02B724.

[14] Jianwu He, Longfei Ma, Senwen Xue, et al. Study of electron-extraction characteristics of an inductively coupled radio-frequency plasma neutralizer [J]. Plasma Sci. Techn., 2018, 20: 025403.

[15] Sina Jahanbakhsh, Mert Satir, Celik Murat. Study of electron current extraction from a radio frequency plasma cathode designed as a neutralizer for ion source applications [J]. Review of Scientific Instruments, 2016, 87: 02B922.

[16] Wang J, Du Y, Zhang X. E-H mode transition density and power in two types of inductively coupled plasma configuration [J]. Physics of Plasmas, 2014, 21: 073502.

[17] 汪建. 射频电感耦合等离子体及模式转变的实验研究 [D]. 合肥: 中国科学技术大学, 2014.

The characteristics of electron extraction of inductively coupled plasma neutralization gun

感应耦合等离子体中和枪的电子引出特性研究

PDF

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 6

Recommended Articles

Metrics

[1]	XING Hai-long, , JIN Wei, LIANG Chuan-hui, DAI Bo, REN Yong, MAO Xin-chun, WANG Dong-ping, WANG Xiao-ying, CHEN Chan-gan . Studies on the ion energy distribution of radio-frequency discharges [J]. Nuclear Fusion and Plasma Physics, 2021, 41(4): 598-602.
[2]	JIA Rui-bao, LUO Tian-yong, CHEN Lun-jiang. Multi-physics simulation of inductively coupled plasma torch based on COMSOL [J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2018, 2(4): 473-481.
[3]	SONG Sha-sha, ZUO Xiao, WEI Yu, CHEN Long-wei, SHU Xing-sheng . Insights into the deposition rate and microstructure of polysilicon films: effect of different hydrogen dilution ratio [J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2014, 34(3): 275-281.
[4]	ZHU Hai-long, TONG Hong-hui, YE Gao-ying, CHEN Lun-jiang. Numerical simulation of two-dimensional inductively coupled plasma torch based on FLUENT [J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2012, 32(3): 199-205.
[5]	WANG Ming-gang, LIU Jie, YANG Wei-feng, LI Chao-bo, XIA Yang. Plasma immersion ion implantation for ultra low energy doping [J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2010, 30(4): 370-373.
[6]	SU Zhi-wei, CHEN Qing-chuan, HAN Da-kai. Design of antenna for RF inductively coupled plasma ion beam source [J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2007, 27(1): 73-77.