Abstract:

The structure design of RF ion source driving source and the heat flow and solid coupling analysis of RF coils were introduced. RF ion source is produced by the external antenna inductive coupling. Using design of dual RF driving source, each RF driving source power is about 60kW, and the total RF ion source power is 120kW, which can produce uniform high-density plasma to meet the stability requirements of long pulse operation. Upon completion of the above work, the RF ion source prototype assembly and preliminary test were completed.

Key words: RF ion source, Plasma generator, Structural design, Heat flow and solid coupling analysis

摘要：

介绍了RF离子源驱动源的结构设计及RF线圈的热流固耦合分析。RF离子源采用外置天线的感应耦合方式，采用双射频驱动源设计，每个射频驱动源功率约60kW，总体功率为120kW，可产生均匀高密度的等离子体，以满足稳定的长脉冲运行的要求。在完成上述工作的基础上完成了RF离子源样机组装和初步实验测试。

关键词: RF离子源, 等离子体发生器, 结构设计, 热流固耦合分析