关键词: 超高真空；氦质谱检漏；残余气体分析；总漏气率 

Abstract: Based on the methods of residual gas monitoring and helium leak testing, the leak test of HL-2M vacuum chamber was performed with the leak detection system after pre-assembly in the factory and on site respectively. After the leakages were repaired, the vacuum chamber was pumped down to test the ultimate vacuum and the total leak rate. The pressure in the vacuum vessel reached 3.7×10⁻⁵Pa after 72 hours’ pumpdown, better than the expected value 1.0×10⁻⁴Pa. The total leak by static constant volume method was 2.3×10^{− 7}Pa⋅m³⋅s⁻¹, lower than the design value 5×10⁻⁷Pa⋅m³⋅s⁻¹. The test shows that the ultrahigh vacuum condition of HL-2M tokamak is achieved and satisfies the design specification.

Key words: Ultrahigh vacuum, Helium leak test, Residual gas analysis, Total leak rate