质谱测量与分析系统的性能测试

核聚变与等离子体物理 ›› 2014, Vol. 34 ›› Issue (2): 135-140.

质谱测量与分析系统的性能测试

曹曾，黄向玫，蔡潇，许正华，田培红，崔成和，高霄雁

(核工业西南物理研究院，成都 610041)

收稿日期:2013-07-25 修回日期:2014-02-12 出版日期:2014-06-15 发布日期:2014-06-16
作者简介:曹曾(1964-)，男，重庆人，研究员，主要从事核真空技术与表面物理研究。
基金资助:
国家磁约束核聚变能研究专项(2010GB108002)

Performance test of gas pressure measuring and analysis system for mass spectrometer

CAO Zeng, HUANG Xiang-mei, CAI Xiao, XU Zheng-hua, TIAN Pei-hong, CUI Cheng-he, GAO Xiao-yan

(Southwestern Institute of Physics, Chengdu 610041)

Received:2013-07-25 Revised:2014-02-12 Online:2014-06-15 Published:2014-06-16

摘要/Abstract

摘要：

对所研制的质谱测量与分析系统进行了性能测试。烘烤后系统的极限真空达到了7.3×10^-7Pa，

总漏气率为3.84×10^-9Pa.m3.s-1。上下球室之间的气体压力，以及漏孔的漏气率与高分辨四极质谱计的氦分压力均

呈现了良好的线性关系。结果满足动态流导法真空校准的技术要求，为氘、氦混合气体的测量与分析提供了条件。

关键词: 极限真空, 漏气率, 线性关系, 动态流导法

Abstract:

The performance test of gas pressure measuring and analysis system for quadrupole mass spectrometer was carried out. The ultimate vacuum is 7.3×10^-7Pa after the system was baked, and total leak rate is 3.84×10^-9Pa•m³•s^-1. The pressure relationship between upper and lower chamber is linear dependence. So is the relationship of the helium leak rate and partial pressure. The results meet the design requirements of dynamic flow conductance, and provide basic conditions for mass spectrograph analysis.

Key words: Ultimate vacuum, Leak rate, Linear dependence, Dynamic flow conductance

中图分类号:

TL62+8

曹曾，黄向玫，蔡潇，许正华，田培红，崔成和，高霄雁. 质谱测量与分析系统的性能测试[J]. 核聚变与等离子体物理, 2014, 34(2): 135-140.

CAO Zeng, HUANG Xiang-mei, CAI Xiao, XU Zheng-hua, . Performance test of gas pressure measuring and analysis system for mass spectrometer[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2014, 34(2): 135-140.