四极质谱计气体分析与测量系统的研制

核聚变与等离子体物理 ›› 2012, Vol. 32 ›› Issue (3): 229-234.

四极质谱计气体分析与测量系统的研制

蔡潇，曹曾，黄向玫，许正华，崔成和，高霄雁

(核工业西南物理研究院，成都 610041)

收稿日期:2011-11-10 修回日期:2012-06-18 出版日期:2012-09-15 发布日期:2012-09-14
作者简介:蔡潇(1974-)，男，湖南省永州市人，工程师，主要从事真空应用与研究。
基金资助:
国家磁约束核聚变能研究专项资助项目(2010GB1008002)

Research and development of gas analysis and testing system of quadrupole mass spectrometer

CAI Xiao, CAO Zeng, HUANG Xiang-mei, XU Zheng-hua, CUI Cheng-he, GAO Xiao-yan

(Southwestern Institute of Physics, Chengdu 610041)

Received:2011-11-10 Revised:2012-06-18 Online:2012-09-15 Published:2012-09-14

摘要/Abstract

摘要：

介绍了为开展漏孔检测、氘-氦分辨性能及真空检漏技术等相关实验研究而进行的四极质谱计分析与测量系统的研制，描述了真空室结构、抽气设备的选型、测量仪器的选择及控制保护子系统工作方式。对系统进行了包括极限真空、残余气体质谱分析、漏放气率、质谱计性能等测试，结果表明本系统达到了设计要求。

关键词: 流导, 漏放气率, 灵敏度, 离子流

Abstract:

The gas analysis and testing system of quadrupole mass spectrometer was designed to research leak calibration, discrimination between helium and deuterium, and leak testing technology. The paper describe the structure of vacuum chamber, selection of pumping equipments, choice of measuring instruments, and working mode of control protection subsystem. The performance experiments of the system, including ultimate vacuum, mass spectrometric analysis of residual gas, leak and outgassing rate, and performance of mass spectrometer, are given. The experimental results show that the gas analysis and testing system satisfies our design requirements.

Key words: Flow conductance, Leak and outgas rate, Sensitivity, Ion current

中图分类号:

TL62+8

蔡潇，曹曾，黄向玫，许正华，崔成和，高霄雁. 四极质谱计气体分析与测量系统的研制[J]. 核聚变与等离子体物理, 2012, 32(3): 229-234.

CAI Xiao, CAO Zeng, HUANG Xiang-mei, XU Zheng-hua, CUI Zheng-he, GAO Xiao-yan. Research and development of gas analysis and testing system of quadrupole mass spectrometer[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2012, 32(3): 229-234.

[1]	张西洋, 许铁军, 姚达毛 . CFETR 偏滤器低温泵抽气系统的设计和有效抽速的计算 [J]. 核工业西南物理研究院, 2024, 44(3): 275-281.
[2]	曹曾，黄向玫，蔡潇，许正华，田培红，崔成和，高霄雁. 质谱测量与分析系统的性能测试[J]. 核聚变与等离子体物理, 2014, 34(2): 135-140.
[3]	徐薇薇，曹磊，宋云涛，周自波，戢翔. EAST 偏滤器V 形区域冷却水管的防烧蚀保护[J]. 核聚变与等离子体物理, 2013, 33(2): 161-165.
[4]	张璐, 曾龙, 谭熠, 谢丽风, 高喆, 王文浩. SUNIST装置中磁探针出气率测量[J]. 核聚变与等离子体物理, 2010, 30(3): 277-280.
[5]	曹曾,崔成和,徐云仙,付卫东,许正华,刘德权,蔡萧,高霄燕. HL-2A托卡马克装置真空系统[J]. 核聚变与等离子体物理, 2005, 25(1): 59-64.