N2射频放电带电粒子(e, N2+, N+)的PIC-MC模拟

核聚变与等离子体物理 ›› 2012, Vol. 32 ›› Issue (3): 206-212.

N₂射频放电带电粒子(e, N₂⁺, N⁺)的PIC-MC模拟

杨莹1，付东儒1，张连珠2

(1. 河北正定中学，正定050800；2. 河北师范大学物理科学与信息工程学院，石家庄 050024)

收稿日期:2011-12-16 修回日期:2012-06-20 出版日期:2012-09-15 发布日期:2012-09-14
作者简介:杨莹(1981-)，女，河北秦皇岛人，二级教师，研究方向为低温等离子体数值模拟。
基金资助:
河北省自然科学基金资助项目(A2012205072)；河北师范大学自然基金(2010Y02)资助课题

The simulations of the charged particles (e, N₂⁺, N⁺) in Nitrogen radio frequency discharge by PIC-MC model

YANG Ying1, FU Dong-ru1, ZHANG Lian-zhu2

(1. Hebei Zhengding Senior High School, Zhengding 050800; 2. College of Physics Science and Information Engineering, Hebei Normal University, Shijiazhuang 050024)

Received:2011-12-16 Revised:2012-06-20 Online:2012-09-15 Published:2012-09-14

摘要/Abstract

摘要：

采用PIC-MC自洽模型，模拟了氮气电容性耦合射频放电的微观等离子体过程及带电粒子(e，N₂⁺，N⁺)的行为。结果表明，离子(N₂⁺，N⁺)的运动状态滞后瞬时射频电场的变化；在两极附近，N₂⁺具较高密度，但能量较低，N⁺具较低的密度但能量较高，两者的密度差6倍左右。两种离子轰击射频电极的能量分布变化规律类似，随放电参数变化，离子(N₂⁺，N⁺)能量变化显著，其密度变化不明显。模拟的电子能量几率分布与测量结果一致。

关键词: N₂等离子体, 射频放电, PIC-MC模拟

Abstract:

N₂ capacitively coupled rf discharge was simulated by PIC/MCC model, in which we computed the rf electric field, the density and mean energy of charged particles (e, N₂⁺, N⁺)，the energy distribution of ions (N₂⁺, N⁺) bombarding rf electrode and their variation by following different discharge parameter (p, V_rf). The simulated results show that, ions (N₂⁺, N⁺) seem to follow the electric field with a slight delay; the ions N⁺ have higher energy near the two electrode, the ions N₂⁺ have higher density, and the N₂⁺ density is about six times of the N⁺ density. With as the change of discharge parameter, the change of the energy of ions (N₂⁺, N⁺) bombarding rf electrode is obvious, but the change of their density is slightly unconspicuous. The simulated results for electron energy probability distribution function are agreement with the measured results.

Key words: Nitrogen plasma, Radio frequency discharge, PIC-MC model

中图分类号:

O539

杨莹1，付东儒1，张连珠2. N₂射频放电带电粒子(e, N₂⁺, N⁺)的PIC-MC模拟[J]. 核聚变与等离子体物理, 2012, 32(3): 206-212.

YANG Ying, FU Dong-ru, ZHANG Lian-zhu. The simulations of the charged particles (e, N₂⁺, N⁺) in Nitrogen radio frequency discharge by PIC-MC model[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2012, 32(3): 206-212.

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N₂射频放电带电粒子(e, N₂⁺, N⁺)的PIC-MC模拟

The simulations of the charged particles (e, N₂⁺, N⁺) in Nitrogen radio frequency discharge by PIC-MC model

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