微波共振探针及其在等离子体诊断中的应用

核聚变与等离子体物理 ›› 2008, Vol. 28 ›› Issue (3): 270-273.

微波共振探针及其在等离子体诊断中的应用

马柳，时家明，袁忠才，陈宗胜，黄勇

(电子工程学院安徽省红外与低温等离子体重点实验室，合肥 230037)

收稿日期:2007-10-11 修回日期:2008-02-24 出版日期:2008-09-15 发布日期:2011-03-03
作者简介:马柳(1984-)，男，河北省辛集市人，硕士研究生，主要从事低温等离子体诊断及应用研究。
基金资助:
新世纪优秀人才支持计划资助项目(NCET-06-0935)

Microwave resonator probe and its application in plasma diagnosing

MA Liu, SHI Jia-ming, YUAN Zhong-cai, CHEN Zong-sheng, HUANG Yong

(Key Lab of Infrared and Low Temperature Plasma of Anhui Province, Electronic Engineering Institute, Hefei 230037)

Received:2007-10-11 Revised:2008-02-24 Online:2008-09-15 Published:2011-03-03

摘要/Abstract

摘要：

介绍了能够测量稳定和时变等离子体电子密度的微波共振探针，给出了其工作原理和在测量稳定、时变和瞬态等离子体电子密度中的应用。分析了传输模式和反射模式的工作过程及对测量范围、测量精度和空间分辨率等影响因素。结果表明，选用较长的探针有利于提高电子密度的测量范围和精度；选用的微波扫频源高端频率越高，频率分辨率越高，则电子密度的测量范围越大，测量精度越高。理论分析得出系统可测量的电子密度约为1.37×10⁸~4.1×10¹¹cm^-3。

关键词: 等离子体诊断, 微波共振探针, 等离子体密度

Abstract:

The microwave resonator probe (hairpin resonator probe), which can be used to measure the electron density of steady and time-resolved plasma, together with the working principle and application of this probe are presented. The process of transmission mode and reflection mode, as well as the effects on measurement range, test precision and the space-resolving capability are analyzed and investigated. It reveals that a longer probe will be efficiency to enhance the test precision and to broaden the measurement range, and choosing the microwave-sweeping source with higher frequency and higher resolving capability will be of the same function. The theoretical analysis shows that the electron density diagnosed by this probe is about 1.37×10⁸~4.1×10¹¹cm^-3.

Key words: Plasma diagnosing, Microwave resonator probe, Plasma density

中图分类号:

O539
TL65

马柳，时家明，袁忠才，陈宗胜，黄勇. 微波共振探针及其在等离子体诊断中的应用[J]. 核聚变与等离子体物理, 2008, 28(3): 270-273.

MA Liu, SHI Jia-ming, YUAN Zhong-cai, CHEN Zong-sheng, HUANG Yong. Microwave resonator probe and its application in plasma diagnosing[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2008, 28(3): 270-273.

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