多腔耦合微波表面波PECVD法沉积 DLC薄膜研究
赵曼曼1，桑利军1，周美丽2，杨丽珍1，刘忠伟1，陈 强1
Study on deposition of DLC coating by the multi-cavity coupling microwave surface-wave PECVD technique
ZHAO Man-man, SANG Li-jun, ZHOU Mei-li, YANG Li-zhen, LIU Zhong-wei, CHEN Qiang
核聚变与等离子体物理
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2018, (3): 368
-372
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DOI: 10.16568/j.0254-6086.201803021
