关键词: 数值模拟, 四阳极, OOPIC;MCC

Abstract:

In order to obtain the characteristics of the plasma generated in the low helium pressure four anodes DC glow discharge, numerical simulation of the discharge using the code OOPIC andMCC has been carried out . Firstly, the OOPIC calculating flow is analyzed and the boundary conditions, the mesh spacing, and the time step in the simulation are presented. Then, the results about the distributions of the plasma density and temperature are analyzed. The results show that, the gas pressure, electrical current, and the virtual breadth of the annular electrode affect the radial distribution of the plasma density and temperature. When the helium pressure is 300Pa, the electrons are distributed equally in almost radial range. But when the pressure is up to 800Pa, radical electron distribut ion varies greatly, and the total density and the average temperature of electron descend. The augmentation of the electrical current makes the plasma density and temperature higher. But the lessening of virtual breadth of the annular electrode makes the radial distribut ion of plasma density more unequal, and the total density and the average temperature lower.