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 Study on the effect of atmospheric pressure on the discharge characteristics of capacitively coupled Ar/O2 plasma at low pressure
WU Liang-chao, YIN Gui-qin, MENG Xiang-guo, ZHOU You-you, WANG Jin-jing
NUCLEAR FUSION AND PLASMA PHYSICS . 2020, (4): 372 -378 .  DOI: 10.16568/j.0254-6086.202004013