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Investigation of the carbon films by Ar/CCl4 plasma jet driven with dual-frequency power under atmospheric pressure
ZHANG Ya-dong, YUAN Qiang-hua, YAN Gui-qin, WANG Yong, LI Yang
NUCLEAR FUSION AND PLASMA PHYSICS . 2019, (1): 89 -96 .  DOI: 10.16568/j.0254-6086.201901014

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