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Study on deposition of DLC coating by the multi-cavity coupling microwave surface-wave PECVD technique
ZHAO Man-man, SANG Li-jun, ZHOU Mei-li, YANG Li-zhen, LIU Zhong-wei, CHEN Qiang
NUCLEAR FUSION AND PLASMA PHYSICS . 2018, (3): 368 -372 .  DOI: 10.16568/j.0254-6086.201803021

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