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Welcome to Nuclear Fusion and Plasma Physics, Today is
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Superintendent: Southwestern Institute of Physics
Sponsored by: Southwestern Institute of Physics
ISSN 0254-6086 CN 51-1151/TL
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中文
Plasma immersion ion implantation for ultra low energy doping
WANG Ming-gang, LIU Jie, YANG Wei-feng, LI Chao-bo, XIA Yang
NUCLEAR FUSION AND PLASMA PHYSICS . 2010, (
4
): 370 -373 .