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Study of discharge properties and parameters of high power pulsed unbalanced magnetron sputtering
MU Zong-xin, WANG Chun, JIA Li, MU Xiao-dong, ZANG Hai-rong, LIU Bing-bing, DONG Chuang
NUCLEAR FUSION AND PLASMA PHYSICS . 2010, (4): 365 -369 . 

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