Welcome to Nuclear Fusion and Plasma Physics, Today is Share:
Study on high growth-rate deposition of nanocrystalline silicon thin film with VHF-PECVD
ZHUANG Juan, WANG De-Zhen, GAO Xin-xin, WANG Yan-hui
NUCLEAR FUSION AND PLASMA PHYSICS . 2009, (1): 87 -91 . 

Copyright © Nuclear Fusion and Plasma Physics, All Rights Reserved.
Tel: 028-82850364　E-mail: bjb@swip.ac.cn
Powered by Beijing Magtech Co., Ltd.