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Superintendent: Southwestern Institute of Physics
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ISSN 0254-6086 CN 51-1151/TL
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中文
Discharge characteristics of capacitively coupled Ar plasmas driven by different frequencies with pressure
YUAN Qiang-hua, LIU Shan-shan, YIN Gui-qin, QIN Biao
Nuclear Fusion and Plasma Physics . 2023, (
4
): 482 -488 . DOI: 10.16568/j.0254-6086.202304018