Studies on the ion energy distribution of radio-frequency discharges
XING Hai-long, , JIN Wei, LIANG Chuan-hui, DAI Bo, REN Yong, MAO Xin-chun, WANG Dong-ping, WANG Xiao-ying, CHEN Chan-gan
Nuclear Fusion and Plasma Physics
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2021, (4): 598
-602
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DOI: 10.16568/j.0254-6086.202104003