Abstract:

A new method for evaluating uncertainty of the results of helium mass spectrometer leak detection is presented. Based on Monte Carlo method, the evaluative model is developed for simulating random detection data to obtain the random samples to calculate the uncertainty of detection result. The uncertainty is analyzed and compared with the uncertainty by traditional method. This indicates that the uncertainties conformity between traditional method and Monte Carlo method which is effective to evaluate uncertainty of the results of helium mass spectrometer leak detection. What’s more, the calculation is more efficiency and application is more comprehensive.

Key words: Helium mass spectrometer leak detection, Uncertainty, Monte Carlo method, Leak rate;Reference leak

摘要：

通过建立检漏结果不确定度的评定模型，应用蒙特卡罗方法对检漏数据进行随机模拟，获得了各输入量的随机样本，计算了检漏结果的不确定度，并与传统评定方法得到的不确定度进行了比较和分析。研究表明，两种方法计算得到的不确定度一致，说明蒙特卡罗方法可以作为评定氦质谱检漏结果不确定度的有效方法，且蒙特卡罗评定方法计算效率更高，应用范围更广。

关键词: 氦质谱检漏, 不确定度, 蒙特卡罗方法, 漏率, 标准漏孔