Abstract:

A new Langmuir probe system based on integrator is introduced. New features of the system include: the integrator network to implement the process of analog-to-digital conversion and to provide effective noise suppression; data processing card to communicate with the host computer. It gives a noise elimination method which increased signal-to-noise ratio dramatically. Successful operation of the system has been demonstrated in the electrically noisy environment of an ECR plasma source.

Key words: Langmuir probe, Plasma diagnostics, Noise elimination, Signal-to-noise ratio, I-V characteristics curve

摘要：

介绍了一套以积分网络为基础的新型Langmuir探针系统。该系统使用积分网络进行数据采集，在数据采集过程中同步完成模/数转换，有效地抑制了噪音干扰。以数据采集卡为接口与计算机系统进行数据通信，提出了一种在等离子体诊断中有效抵制噪音干扰的方法，大幅度提高了探针的信噪比。探针系统已成功地应用于ECR等离子体源中。实验表明：该探针系统具有良好的抗干扰效果，得到的I-V特性曲线平滑，无明显的背景干扰信号，获得高出普通Langmuir探针10.9dB的探针信噪比。

关键词: Langmuir探针, 等离子体诊断, 抗干扰, 信噪比, I-V特性曲线