Study on out-gassing by baking and glow discharge during wall conditioning of vacuum chamber

NUCLEAR FUSION AND PLASMA PHYSICS ›› 2007, Vol. 27 ›› Issue (1): 77-80.

• Research Report • Previous Articles

Study on out-gassing by baking and glow discharge during wall conditioning of vacuum chamber

WANG Zhi-wen, WEI Wei-xing, ZHAO Yuan-qing, HE Yan-he, LIAO Yi-kui

(Guangxi University for Nationalities, Nanning 530006)

Received:2006-03-23 Revised:2006-10-13 Online:2007-03-15 Published:2011-11-28

装置器壁烘烤出气与辉光放电清洗出气研究

王志文，韦卫星，赵元庆，何燕和，廖义奎

(广西民族大学物理与电子工程学院，南宁 530006)

作者简介:王志文（1969-），男，四川省华蓥市人，教授，从事真空表面和低温等离子体物理研究。
基金资助:
广西青年基金资助项目(桂科青0229017)

Abstract

Abstract:

The model of out-gassing by baking and glow discharge cleaning (GDC) is set up. The properties of them are studied. Out-gassing by baking is from bulk and it obeys the diffusion equation. Out-gassing of glow discharge cleaning is mainly on surface, it is inducement out-gassing by sputtering. Thus the properties of out-gassing for baking and GDC on the HL-1M tokamak are analyzed. Some empirical formulas are given.

Key words: Out-gassing, Diffusion, Glow discharge cleaning

摘要：

建立了烘烤出气和辉光放电清洗(GDC)出气的物理模型，研究了装置器壁的烘烤出气和辉光放电清洗出气特点。烘烤出气是体出气，出气过程满足扩散方程；GDC 出气是溅射脱附过程，它主要是器壁表面的溅射诱导出气。由此分析了HL-1M装置的烘烤出气和辉光放电清洗出气特点，得出了一些经验公式。

关键词: 出气, 扩散, 辉光放电

CLC Number:

TN107

WANG Zhi-wen, WEI Wei-xing, ZHAO Yuan-qing, HE Yan-he, LIAO Yi-kui. Study on out-gassing by baking and glow discharge during wall conditioning of vacuum chamber[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2007, 27(1): 77-80.

王志文，韦卫星，赵元庆，何燕和，廖义奎. 装置器壁烘烤出气与辉光放电清洗出气研究[J]. 核聚变与等离子体物理, 2007, 27(1): 77-80.

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Study on out-gassing by baking and glow discharge during wall conditioning of vacuum chamber

装置器壁烘烤出气与辉光放电清洗出气研究

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