微波电子回旋共振等离子体化学气相沉积法制备多晶硅薄膜
左 潇，魏 钰，陈龙威，舒兴胜，孟月东
The fabrication of polycrystalline Si thin film by electron cyclotron resonance plasma source enhanced CVD
ZUO Xiao, WEI Yu, CHEN Long-wei, SHU Xin-sheng, MENG Yue-dong
核聚变与等离子体物理
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2012, (4): 356
-361
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