高功率脉冲非平衡磁控溅射放电特性和参数研究
牟宗信，王春，贾莉，牟晓东，藏海荣，刘冰冰，董闯
Study of discharge properties and parameters of high power pulsed unbalanced magnetron sputtering
MU Zong-xin, WANG Chun, JIA Li, MU Xiao-dong, ZANG Hai-rong, LIU Bing-bing, DONG Chuang
核聚变与等离子体物理
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2010, (4): 365
-369
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