关键词: RF 离子源, 阻抗匹配电路, RF 变压器

Abstract:

For a RF ion source test facility, the driver is used to produce plasma, and the matching unit is the key for the driver to absorb RF power. The driver’s impedance could be equivalent to a resistance and an inductance in series. A matching unit which consisted of an RF transformer and two variable capacitances was chosen, it was analyzed by an ideal transformer model and its electrical parameters were derived under the condition of matching. When a quartz glass driver was mounted onto the test facility at HUST, a matching unit was implemented, it transmitted RF power into the driver and then plasma was successfully produced.

Key words: High-power RF based ion source, Matching unit, RF transformer