脉冲调制射频功率测量中的标定及FFT分析方法研究

核聚变与等离子体物理 ›› 2011, Vol. 31 ›› Issue (4): 297-304.

脉冲调制射频功率测量中的标定及FFT分析方法研究

霍伟刚1, 2，苏成1，孙斌1，丁振峰1

(1. 大连理工大学物理与光电学院，大连 116023；2. 辽宁师范大学物理与电子技术学院，大连 116029)

收稿日期:2011-02-17 修回日期:2011-08-22 出版日期:2011-12-15 发布日期:2011-12-09
作者简介:霍伟刚(1977-)，男，河南驻马店人，博士研究生，讲师，从事等离子体物理研究。
基金资助:
国家自然科学基金资助项目(10835004)

Studies on calibration method and FFT analysis in power measurement of pulse-modulated RF signal

HUO Wei-gang1, 2, SU Cheng1, SUN Bin1, DING Zhen-feng1

(1. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023; 2. School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029)

Received:2011-02-17 Revised:2011-08-22 Online:2011-12-15 Published:2011-12-09

摘要/Abstract

摘要：

利用电压/电流探头和数字示波器实现了脉冲调制射频功率测量。电压/电流探头输出的电压、电流信号由数字示波器采集存储，电压、电流的幅值及相位差由FFT分析得到。在不同频率下，对电压、电流幅值及相位差进行标定，获得计算射频功率的标定参数。分析表明电压、电流相位差是影响标定系数的主要因素，FFT方法处理非稳态调幅电压、电流时存在问题，只有在零无功功率处才能获得可信的吸收功率。

关键词: 脉冲射频功率测量, 电压/电流探针, 标定, 非稳态FFT, 相位差

Abstract:

The capability of a commercial-available voltage/current probe, intended to monitor steady or slowly-varying RF signals, is improved to measure pulse-modulated RF signals. The improvement is realized by means of combination of voltage/current probe sensor and a digital oscilloscope. The outputs of voltage/current probes are acquired with the digital oscilloscope, and their amplitudes and phase difference are obtained with FFT. Under different frequencies, current/voltage amplitude and phase difference are calibrated in order to calculate RF power. The phase difference between voltage and current is the key factor influencing calibration coefficients. Results show the calibrated current/voltage probe can provide reliable and repetitive measurements. FFT method is problematic in analyzing nonstationary amplitude-modulated voltage and current signals, and the pulsed RF power can be only reliably calculated at time when reactive power is zero.

Key words: Power measurement of pulsed RF signal, Voltage/current probes, Calibration, Nonstationary FFT analysis, Phase difference

中图分类号:

O539

霍伟刚1, 2，苏成1，孙斌1，丁振峰1. 脉冲调制射频功率测量中的标定及FFT分析方法研究[J]. 核聚变与等离子体物理, 2011, 31(4): 297-304.

HUO Wei-gang, SU Cheng, SUN Bin, DING Zhen-feng. Studies on calibration method and FFT analysis in power measurement of pulse-modulated RF signal[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2011, 31(4): 297-304.

参考文献

[1] Park F J, Henins I, Herrmann H W, et al. An atmospheric pressure plasma source[J]. Appl. Phys. Lett., 2000, 76: 288-290.

[2] Balcon N, Aanesland A, Boswell R. Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon[J]. Plasma Sources Sci. Techn., 2007, 16: 217 -225.

[3] Ye R, Ishigaki T, Sakvta T. Controlled generation of pulse-modulated RF plasmas for materials processing[J]. Plasma Sources Sci. Techn., 2005, 14: 387-396.

[4] Shi J J, Zhang J, Qiu G, et al. Modes in a pulse- modulated radio-frequency dielectric-barrier glow dis- charge[J]. Appl. Phys. Lett., 2008, 93: 041502.

[5] Guo W, Jr C A D. Time-resolved current and voltage measurements on a pulsed rf inductively coupled plasma[J]. Plasma Sources Sci. Techn., 2001, 10: 43–51.

[6] Overzet L J, Leong-Rousey F Y. Time-resolved power and impedance measurements of pulsed radiofrequency discharges[J]. Plasma Sources Sci. Techn., 1995, 4: 432 -443.

[7] Paul M K, Chattopadhyay P K, Bora D. Electrostatic pickup rejection in low plasma current measurement[J]. Measurement Science and Technology, 2007, 18: 2673– 2680.

[8] Coccoresea V, Artasersea G, Chitarinb G, et al. Manufacturing and commissioning of the new Ex-vessel magnetic diagnostics system for JET[J]. Fusion Engineering and Design, 2007, 82: 1348–1358.

[9] Hargis P J, Greenberg K E. The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges[J]. Rev. Sci. Instrum., 1994, 65 (l): 140–154.

[10] Zhang J, Ding K, Wei K Y, et al. Excitation frequency dependent mode manipulation in radio-frequency atom- spheric argon glow discharges[J]. Physics of Plasma, 2009, 16: 090702-1-4.

[1]	江堤, 叶孜崇(Yip Chi-Shung), 靳琛垚, 张炜, 徐国盛, 王亮. 基于多偶极腔体的氦灰激光诱导荧光诊断实验验证研究[J]. 核工业西南物理研究院, 2024, 44(2): 242-248.
[2]	陈力行, 陈大龙, 沈飊, 钱金平, 陈明. TT-1装置磁探针设计与频响特性研究[J]. 核工业西南物理研究院, 2024, 44(1): 105-110.
[3]	马铭键, 叶孜崇(Yip Chi-shung), 江堤, 毛世峰, 张炜, 靳琛垚, 叶民友 . 激光诱导荧光诊断的波长标定方法的研究 [J]. 核工业西南物理研究院, 2023, 43(4): 469-476.
[4]	郑盈盈, 林士耀, 吴国斌, 赵金龙, 张继宗, 周润晖, 李强, 曹宏睿, 袁旗平, 肖炳甲 . 二维硬 X 射线探测器自动标定平台研究 [J]. 核工业西南物理研究院, 2023, 43(3): 324-331.
[5]	许棕, 黎嫘, 张凌, 程云鑫, 陈颖杰, 王守信, 周天富, 刘海庆. EAST装置氦等离子体用于极紫外光谱的绝对强度标定[J]. 核聚变与等离子体物理, 2022, 42(3): 336-341.
[6]	张均钊, 季小全, 孙腾飞, 梁绍勇, 王傲, 王金, 李佳鲜, 刘健, 杨青巍 . HL-2M 装置磁探针研制[J]. 核聚变与等离子体物理, 2021, 41(4): 585-590.
[7]	臧临阁, 屈玉凡, 万林, 付宏涛, 罗小兵, 卢杰, 于利明, 李伟, 石中兵, 杨青巍 . 紧凑针孔中性粒子分析器标定系统的设计和研制[J]. 核聚变与等离子体物理, 2021, 41(3): 193-198.
[8]	何小斐，余德良，刘亮，魏彦玲，陈文锦，钟武律，何小雪，吴豪. 相对标定电荷交换复合谱及束发射谱测量杂质浓度的方法研究[J]. 核聚变与等离子体物理, 2020, 40(3): 193-199.
[9]	王硕，宋显明，宋啸，毛瑞. HL-2A 等离子体位形重建研究[J]. 核聚变与等离子体物理, 2016, 36(3): 193-198.
[10]	张明1, 2，袁涛1, 2，郑玮1, 2，刘洋1, 2，李强1, 2，陈志1, 2. J-TEXT 偏振仪信号相位差实时计算方法研究[J]. 核聚变与等离子体物理, 2015, 35(4): 308-313.
[11]	孙久玉，沈飙，刘广君，孙有文，钱金平，李实，肖炳甲，陈大龙，石同辉. EAST 磁探针 NS 值标定[J]. 核聚变与等离子体物理, 2014, 34(3): 265-269.
[12]	张洪明1，沈永才1，符佳1，李颖颖1，熊言威1，王福地1，吕波1，吴振伟1，石跃江2, 3，万宝年1. EAST软X射线光谱仪绝对强度标定[J]. 核聚变与等离子体物理, 2013, 33(4): 312-319.
[13]	易荣清1，宋天明1，赵屹东2，郑雷2，马陈燕2. X射线探测元件在1750~3500eV能区的标定[J]. 核聚变与等离子体物理, 2013, 33(4): 320-323.
[14]	杨杰1，李爱侠1，马阳成1，杨群1，侍行剑2. EAST天线相位差对低杂波功率沉积和驱动电流的影响[J]. 核聚变与等离子体物理, 2013, 33(1): 25-29.
[15]	黄贤礼，石中兵，孙红娟，刘泽田，崔正英，丁玄同. HL-2A装置ECE测量系统标定研究[J]. 核聚变与等离子体物理, 2011, 31(3): 193-199.