利用介质阻挡探针法测量大气压氦等离子体射流电子密度

核聚变与等离子体物理 ›› 2014, Vol. 34 ›› Issue (4): 374-378.

利用介质阻挡探针法测量大气压氦等离子体射流电子密度

齐冰，周秋娇，潘丽竹，张梦蝶，黄建军

(深圳大学物理科学与技术学院，深圳518060)

收稿日期:2013-11-06 修回日期:2014-07-18 出版日期:2014-12-15 发布日期:2014-12-15
作者简介:齐冰(1978-)，男，吉林省吉林市人，博士，副教授，主要从事大气压辉光放电等离子体研究。
基金资助:
国家自然科学基金资助项目(11105093)；深圳市科技计划项目(JC201005280485A)

Measurement of electron density in the atmospheric pressure helium plasma jet by using a dielectric probe

QI Bing, ZHOU Qiu-jiao, PAN Li-zhu, ZHANG Meng-die, HUANG Jian-jun

(College of Physics Science and Technology Shenzhen University, Shenzhen 518060)

Received:2013-11-06 Revised:2014-07-18 Online:2014-12-15 Published:2014-12-15

摘要/Abstract

摘要：

分别利用电子的漂移速度和等离子体的传播速度计算了大气压下氦等离子体射流的电子密度。

通过介质阻挡探针测量氦等离子体的射流电流，再利用电压探头测量等离子体放电电流信号，

计算出电子的漂移速度和等离子体的传播速度。实验结果表明，两种方法计算出来的结果相

当，射流轴向上的氦等离子体电子密度值约为10 ¹¹ cm⁻³，并随着外加电压的增加而增加，沿

着轴向方向，射流电子密度维持在一个稳定值范围内。用介质阻挡探针测量得到的电子密度与

用罗科夫斯基线圈及朗缪尔探针测量得到的大气压非热氦等离子体射流的电子密度值一致，比

用微波天线测量的值低一个数量值。

关键词: 大气压氦等离子体, 冷等离子体射流, 介质阻挡探针, 射流电子密度

Abstract:

The electron densities in the atmospheric pressure helium plasma were calculated by means of electron drift velocity and the jet velocity respectively. The electron velocity and jet velocity can be calculated by means of helium plasma jet current measured by a dielectric probe and plasma discharge current signal measured by voltage probes. The results show that the estimated electron densities of the helium plasma jet calculated from electron drift velocity and the jet velocity are in the order of 10 ¹¹ cm^-3 and they increase with applied voltage. There is a little fluctuation in the value of the electron density along the jet axis of the plasma. This result is the same as the measured electron density in atmospheric pressure helium non-thermal plasma jet by using a Rogowski coil and a Langmuir probe. This is in one order lower than the electron density measured by microwave antenna.

Key words: Atomspheric pressure helium plasma, Cold plasma jet, Dielectric probe, Jet electron density

中图分类号:

O539，O436，O462.2

齐冰，周秋娇，潘丽竹，张梦蝶，黄建军. 利用介质阻挡探针法测量大气压氦等离子体射流电子密度[J]. 核聚变与等离子体物理, 2014, 34(4): 374-378.

QI Bing, ZHOU Qiu-jiao, PAN Li-zhu, ZHANG Meng-die, HUANG Jian-jun. Measurement of electron density in the atmospheric pressure helium plasma jet by using a dielectric probe[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2014, 34(4): 374-378.

参考文献

[1] Nowling G R, Babayan S E, Jankovic V, et a1. Remote plasma enhanced chemical vapour deposition of silicon nitride at atmospheric pressure [J]. Plasma Sources Science and Technology, 2002, 11(1): 97−103.
[2] Jeong J Y, Babayan S E, Sehiitze A, et a1. Etching polyimide with a nonequilibrium atmosp- heric-pressure plasma jet [J]. Journal of Vacuum Science & Technology A, 1999, 17 (5):2581−2585.
[3] Li G, Li H P, Wang L Y, et a1. Genetic effects of radio-frequency, atmospheric pressure glow discharges with thelium [J]. Appl. Phys. Lett., 2008, 92(22): 221504.
[4] Li H P, Li G, Sun W T, et a1. Radio-frequency, atmospheric pressure glow discharges: producing methods,characteristics and applications in biomedical fields [C]. AIP Conference Proceeding, 2008. 584−591.
[5] Herrmann H W, Henins I, ParkJ, et a1. Decontam-ination of chemical and biological warfare(CBW) agents using an atmospheric pressure plasma jet (APPJ) [J]. Phys. Plasmas, 1999, 6(5): 2284−2289.
[6] Fridman G, Friedman G, GutsolA, et a1. Applied plasma medicine [J]. Plasma Processes and Polymers, 2008, 5(6): 503−533.
[7] 郑培超，王金梅，胡章芳，等. 大气压微等离子体射流对聚酰亚胺薄膜的表面改性[J]. 高电压技术，2010, 36(6): 1542−1546.
[8] 卢新培. 离子体射流及其医学应用[J]. 高电压技术，2011, 37(6): 1416−1425.
[9] 于清旋. 大气压针——板DBD发射光谱的斯塔克展宽特性[D]. 大连: 大连海事大学，2012. 2−9.
[10] 李成榕，王新新. 大气压下的辉光放电[J]. 高电压技术, 2002, 28(120): 1−3.
[11] Xu G-U, Ma Y, Zhang G-J. DBD plasma jet in atmospheric pressure argon[J].IEEE Trans. Plasma Sci., 2008, 36(4): 1352−1353.
[12] Begum A, Laroussi M, PervezM R. Dielectric probe: a new electrical diagnostic toolfor atmospheric pressure non-thermal plasma jet[J]. J.Phys. International Journal of Engineering & Technology IJET-IJENS, 2011, 11(3): 209−215.
[13] Reizer Y P. Gas discharge physics[M]. German: Springer-verlag, 1991.
[14] Bazelian E M, Reizer Y P. Spark discharge[M]. Florida: CRC-Press, 1998.
[15] Shashnurin A, Shneider M N, Dogariu A, et al. Temporal behavior of cold atmospheric plasma jet[J]. Appl. Phys. Lett., 2009, 94(23): 231504.
[16] Sakai O, Kishimoto Y, Tachibana K. Integrated coaxial-hollow micro-dielectric barr-ier-discharges for a large- area plasma source operating at around atmospheric pressure[J]. J. Phys. D: Appl. Phys., 2005, 38(3): 431.
[17] Shashnurin A, Shneider M N, Dogariu A, et al. Temporary-resolved measurement of electron density in small atmospheric plasma[J]. Appl. Phys. Lett., 2009, 96(1 71502): 1−3.