氢气甚高频与高频容性耦合放电等离子体特征的比较

核聚变与等离子体物理 ›› 2011, Vol. 31 ›› Issue (4): 320-326.

氢气甚高频与高频容性耦合放电等离子体特征的比较

姚福宝，郝莹莹，张连珠，赵海涛

(河北师范大学物理科学与信息工程学院，石家庄 050024)

收稿日期:2011-04-15 修回日期:2011-09-23 出版日期:2011-12-15 发布日期:2011-12-09
作者简介:姚福宝(1984-)，男，河北临漳人，硕士研究生，研究方向为低温等离子体数值模拟。
基金资助:
河北省自然科学基金资助课题(A2006000123)；河北师范大学自然科学基金资助课题(L2010Y02)

Comparison between capacitively coupled VHF and high frequency discharge in H₂

YAO Fu-bao, HAO Ying-ying, ZHANG Lian-zhu, ZHAO Hai-tao

(College of Physics Science and Information Engineering, Hebei Normal University, Shijiazhuang 050024)

Received:2011-04-15 Revised:2011-09-23 Online:2011-12-15 Published:2011-12-09

摘要/Abstract

摘要：

开发了氢气甚高频(60MHz)容性耦合放电的PIC/MC模型。在模型中考虑了带电粒子(e，H⁺，H₂⁺，H₃⁺))与H₂的21种碰撞反应过程，模拟了氢气甚高频放电射频电场和电势分布以及电子和氢离子(H⁺，H₂⁺，H₃⁺)粒子密度和平均能量分布，并与频率为13.56MHz的放电结果进行了比较。结果表明，相对于频率13.56MHz的放电，氢气甚高频放电等离子体电势增高，导致两电极附近的电场增强；另外，两鞘层厚度变窄并且电子和H₃⁺离子平均能量减小，其总密度却增加。H₃⁺离子为氢气甚高频放电空间的主要离子，H₂⁺离子密度比H₃⁺离子小约2～3个数量级。

关键词: 氢气甚高频容性耦合放电, PIC/MC模拟, H2等离子体

Abstract:

This paper presents PIC/MC model of capacitively coupled very-high-frequency discharge in hydrogen. We take into account 21 kinds of collisions of charged particles (e, H⁺,H₂⁺, H₃⁺) with H₂, have simulated the electric field distribution, potential distribution, density and mean energy distribution of electrons and hydrogen ions ( H⁺, H₂⁺, H₃⁺), and have compared with those of the frequency of 13.56MHz. The simulation results show that the plasma space potential is enhanced with the increase of driving frequency, which results in the increase of electric field near the two electrodes. Besides, rf sheath thickness becomes thin and the mean energy of electron and H₃⁺ is decreased, while their total density is increased with the increase of frequency. H₃⁺ is the dominant ion in the H₂ very-high-frequency discharge, its density being two or three orders of magnitude higher than that of H₂⁺.

Key words: H2 capacitively coupled very-high-frequency discharge, PIC/MC model, H2 plasma

中图分类号:

O539

姚福宝, 郝莹莹, 张连珠, 赵海涛. 氢气甚高频与高频容性耦合放电等离子体特征的比较[J]. 核聚变与等离子体物理, 2011, 31(4): 320-326.

YAO Fu-bao, HAO Ying-ying, ZHANG Lian-zhu, ZHAO Hai-tao. Comparison between capacitively coupled VHF and high frequency discharge in H₂[J]. NUCLEAR FUSION AND PLASMA PHYSICS, 2011, 31(4): 320-326.

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