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核聚变与等离子体物理 ›› 2006, Vol. 26 ›› Issue (1): 71-74.

• 研究报告 • 上一篇    下一篇

平板直流负偏压碰撞鞘层Child-Langmuir定律的拟合公式

钱丹娜,李雪春,王友年   

  1. (大连理工大学物理系,三束材料改性国家重点实验室,大连116024)
  • 收稿日期:2005-08-08 修回日期:2005-11-08 出版日期:2006-03-15 发布日期:2012-05-29
  • 作者简介:钱丹娜(1981-) ,女,河北石家庄人,硕士研究生,2003年毕业于河北师范大学,现从事低温等离子体物理研究。
  • 基金资助:

    国家自然科学基金资助项目(10376003)

Fitted expression of Child-Langmuir law for planar direct-current biased negative voltage collision sheaths

QIAN Dan-na, LI Xue-chun, WANG You-nian   

  1. (State Key Lab of Materials Modification by Beams , Department of Physics , Dalian University of Technology , Dalian 116024)
  • Received:2005-08-08 Revised:2005-11-08 Online:2006-03-15 Published:2012-05-29

摘要:

采用流体动力学模型研究了离子与中性粒子的电荷交换碰撞效应对直流偏压鞘层厚度的影响。对于平板鞘层, 结果表明随着碰撞参数的增大, 鞘层厚度明显地变小。根据数值结果, 给出了碰撞情况下的Child-Langmuir定律的拟合式。研究了柱形和球形靶的靶半径对鞘层厚度的影响。

关键词: 鞘层, Child-Langmuir定律, 碰撞效应

Abstract:

With the hydrodynamic model , effects of the charge-exchange collisions between ions and neutrals on the direct-current biased voltage sheaths is studied. For planar target , the sheath thickness becomes smaller as collision parameter increases. A fitted expression of the Child-Langmiur law for the planar sheath is presented based on the numerical results. In addition , the influence of the target radius on the sheath thickness is also studied for the cylindrical and spherical targets , respectively.

Key words: Sheath , Child-Langmuir law , Collision effect

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