气压对于低气压双频容性耦合Ar/O2 等离子体放电特性影响的研究
吴良超，殷桂琴*，孟祥国，周有有，王兢婧
Study on the effect of atmospheric pressure on the discharge characteristics of capacitively coupled Ar/O2 plasma at low pressure
WU Liang-chao, YIN Gui-qin, MENG Xiang-guo, ZHOU You-you, WANG Jin-jing
核聚变与等离子体物理
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2020, (4): 372
-378
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DOI: 10.16568/j.0254-6086.202004013
